In this particular paper, The brand new lapping slurry and sprucing slurry are introduced. Along with the deliquescence diploma of CLBO is fallen to lowest. A fresh Performing technologies is additionally adopted. Immediately after rough polishing, the focus of extremely-precision sprucing slurry is increased properly. So does the extremely-precision sprucing velocity, along with the wiping pace is quicker when compared to the deliquescence pace. The CLBO crystal area roughness can accomplish 1nm and keep the floor high-quality perfectly. Accessibility by means of your establishment
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We summarized The present enhancement standing of the superior-electricity DUV laser both of those with the wavelength of FHG of the 1-μm laser and at 193 nm. The current enhancement in the stable-condition/fiber laser, as well as the nonlinear optical crystals, prompts not merely the average electrical power but will also the beam good quality (coherence) of your DUV lasers to an unparalleled degree.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点,广泛应用于机械探伤、光刻、微加工和医学等领域,等,利用大功率近红外相干光源作为基于非线性调谐技术的基频源,通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一,因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
On the other hand, the beam excellent of the greater power DUV laser would develop into worse as a consequence of additional severe thermal and nonlinear outcomes. Hence, the frequency conversion processes must be diligently designed to mitigate the aforementioned results. Thus, a higher-electricity DUV laser for the FHG of one μm with a fantastic beam excellent may be received and can be useful for acquiring the shorter wavelength DUV lasers including 193 nm by SFG.
LBO can also be a wonderful nonlinear crystal which is always applied to the SHG from the NIR on the environmentally friendly. The DUV laser is generally recognized by two phases of SFG from the LBO crystals since there's no stage-matching angle for LBO to convert the eco-friendly laser at 515 nm or 532 nm on the DUV instantly by SHG [sixteen]. Recently, the NSBBF crystal has also shown its possible to obtain a high conversion efficiency from 532 nm to 266 nm. The wander-off angle and deff with the NSBBF are Just about just like These of CLBO [seventeen].
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The pulse length of the second Stokes gentle was shortened to 5 ns as revealed in Figure 7a, only one-shot image from the oscilloscope, and that is a common phenomenon in Raman laser [forty four] while the heart beat duration on the pump laser was ten ns.
Furthermore, combining the stable-condition laser with other nonlinear process for example stimulated Raman scattering, NIR lasers might be reached at new wavelengths with superior electrical power and significant beam quality, which was tested through the evidence-of-theory experiment. This Raman laser plan delivers a fresh route to the substantial-electric power DUV laser, Primarily for the wavelength of 193 nm.
The beam profile proven in Determine 7b shown a good beam top quality as among the list of deserves of Raman laser, which might be beneficial to produce a 193-nm DUV laser with a high quality beam.
The conversion effectiveness from fundamental NIR to DUV is from five% to 36% according to the described results in Desk 1. Expanding the conversion effectiveness will lessen the load on the look and setup of the elemental laser amplifier in addition to the electric powered energy intake. A good beam excellent of the elemental laser more info will even lead into the growing on the conversion performance as well as the appropriate electricity depth with the NIR and environmentally friendly laser within the SHG and FHG method, respectively. The very best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by use of CLBO crystal are 70% and about 50%, respectively [twelve], which corresponds into the conversion performance of 35% from essential to DUV.
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